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Thuy Dao

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Featured publications

Through Silicon Via stress characterization26 citations
· 2009 · DOI
Mixed-signal performance of sub-100nm fully-depleted SOI devices with metal gate, high K (HfO/sub 2/) dielectric and elevated source/drain extensions26 citations
· 2004 · DOI
Micro-scale measurement and modeling of stress in silicon surrounding a tungsten-filled through-silicon via21 citations
Journal of Applied Physics · 2011 · DOI
Effect of device type and plasma process on the oxide thickness dependence of plasma-induced charging damage10 citations
· 2002 · DOI
Performance and reliability of sub-100nm TaSiN metal gate fully-depleted SOI devices with high-k (HfO/sub 2/) gate dielectric7 citations
· 2004 · DOI
Thermo-mechanical stress characterization of tungsten-fill through-silicon-via7 citations
· 2010 · DOI
International Conference on IC Design & Technology6 citations
· 2009
Charging of Underlayer at Via Etch causing Slow Down in Oxide Etch Rate5 citations
· 2005 · DOI
Thermo-mechanical stress characterization of tungsten-fill through-silicon-via4 citations
· 2010 · DOI
Through-Silicon-Via stress 3D modeling and design4 citations
· 2010 · DOI

About the field of Physics

Common research topics in this field:

Graphene research and applicationsQuantum Dots Synthesis And Properties2D Materials and ApplicationsPhotonic and Optical DevicesOptical Network TechnologiesChalcogenide Semiconductor Thin Films

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Thuy DaoHanoi Medical University
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